A nitriding process of very thin molybdenum films in an...

IOP Conference Series Materials Science and Engineering 2010 / 06 Vol. 12

A nitriding process of very thin molybdenum films in an expanding microwave plasma at low temperature

Touimi, S, Jauberteau, I, Weber, S, Bessaudou, A, Passelergue, A, Mayet, R, Jauberteau, J L, Aubreton, J
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Volume:
12
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/12/1/012009
Date:
June, 2010
File:
PDF, 1.18 MB
2010
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