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Deposition of Carbon Thin Film by Means of a Low-Frequency Plasma Sputtering Using Battery Carbon Rods as a Target
Purkuncoro, Aladin E., Santjojo, Dionysius J. D. H., Irawan, Yudy S., Soenoko, RudyVolume:
515
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/515/1/012041
Date:
April, 2019
File:
PDF, 509 KB
2019