SiGe nanostructure fabrication through selective epitaxial growth using self-assembled nanotemplates
Park, Sang-Joon, Hwang, In Chan, Lee, Heung Soon, Son, Jong Yeog, Kim, HyungjunVolume:
6
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/6/1/012019
Date:
November, 2009
File:
PDF, 1.12 MB
2009