SiGe nanostructure fabrication through selective epitaxial...

SiGe nanostructure fabrication through selective epitaxial growth using self-assembled nanotemplates

Park, Sang-Joon, Hwang, In Chan, Lee, Heung Soon, Son, Jong Yeog, Kim, Hyungjun
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Volume:
6
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/6/1/012019
Date:
November, 2009
File:
PDF, 1.12 MB
2009
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