Features of combining scanning probe microscope with optical and scanning electron microscopes
Sapozhnikov, I D, Gorbenko, O M, Felshtyn, M L, Zhukov, M V, Golubok, A OVolume:
699
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/699/1/012040
Date:
December, 2019
File:
PDF, 1.10 MB
2019