The Influence of Hollow Cathode Geometry and N...

IOP Conference Series Materials Science and Engineering 2020 / 07 Vol. 833

The Influence of Hollow Cathode Geometry and N 2 -H 2 Gas Mixture on the 2 MHz RF-DC Plasma Species and Density

Windajanti, J M, Abdurrouf,, H Santjojo, D J Djoko, Pamungkas, M A
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Volume:
833
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/833/1/012097
Date:
July, 2020
File:
PDF, 964 KB
2020
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