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Thermochemical grinding of diamond films in installation for chemical vapor deposition of diamond from the gas phase
Eremin, S A, Kolesnikova, A M, Leontiev, I A, Anikin, V N, Yu Kudryashov, O, Yashnov, Y M, Zhdanova, M VVolume:
848
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/848/1/012016
Date:
May, 2020
File:
PDF, 1.02 MB
2020