Impact of the diaphragm structure on the linearity and temperature sensitivity of low-pressure piezo-resistive MEMS pressure sensors
Nithin,, Rao, Rathnamala, Bhat, K NVolume:
872
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/872/1/012022
Date:
June, 2020
File:
PDF, 998 KB
2020