Impact of the diaphragm structure on the linearity and...

Impact of the diaphragm structure on the linearity and temperature sensitivity of low-pressure piezo-resistive MEMS pressure sensors

Nithin,, Rao, Rathnamala, Bhat, K N
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Volume:
872
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899x/872/1/012022
Date:
June, 2020
File:
PDF, 998 KB
2020
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