Ammonia assisted low temperature growth of In...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 05 Vol. 38; Iss. 3

Ammonia assisted low temperature growth of In 2 O 3 (111) epitaxial films on c-sapphire substrates by chemical vapor deposition technique

Yadav, Santosh Kumar, Das, Souvik, Prasad, Nivedita, Barick, Barun K., Arora, Simran, Sutar, Dayanand S., Dhar, Subhabrata
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/6.0000038
Date:
May, 2020
File:
PDF, 2.64 MB
2020
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