Femtosecond Laser Annealing of Multilayer Thin-Film Structures Based on Amorphous Germanium and Silicon
Kolchin, A. V., Shuleiko, D. V., Pavlikov, A. V., Zabotnov, S. V., Golovan, L. A., Presnov, D. E., Volodin, V. A., Krivyakin, G. K., Popov, A. A., Kashkarov, P. K.Volume:
46
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785020060048
Date:
June, 2020
File:
PDF, 698 KB
2020