Reactive deposition growth of highly (001)-oriented BaSi2...

Materials Science in Semiconductor Processing 2020 / 07 Vol. 113

Reactive deposition growth of highly (001)-oriented BaSi2 films by close-spaced evaporation

Hara, Kosuke O., Takizawa, Shuhei, Yamanaka, Junji, Usami, Noritaka, Arimoto, Keisuke
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Volume:
113
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2020.105044
Date:
July, 2020
File:
PDF, 2.50 MB
2020
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