Micromachined Accelerometers with Sub-µg/√Hz Noise...

Micromachined Accelerometers with Sub-µg/√Hz Noise Floor: A Review

Wang, Chen, Chen, Fang, Wang, Yuan, Sadeghpour, Sina, Wang, Chenxi, Baijot, Mathieu, Esteves, Rui, Zhao, Chun, Bai, Jian, Liu, Huafeng, Kraft, Michael
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Volume:
20
Journal:
Sensors
DOI:
10.3390/s20144054
Date:
July, 2020
File:
PDF, 9.79 MB
2020
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