4 W Power MEMS Relay With Extremely Low Contact Resistance:...

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Journal of Microelectromechanical Systems 2020

4 W Power MEMS Relay With Extremely Low Contact Resistance: Theoretical Analysis, Design and Demonstration

Kim, Su-Bon, Yoon, Yong-Hoon, Lee, Yong-Bok, Choi, Kwang-Wook, Jo, Min-Seung, Min, Hyun-Woo, Yoon, Jun-Bo
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Year:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3005437
File:
PDF, 4.57 MB
2020
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