[IEEE 2019 20th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Erlagol (Altai Republic), Russia (2019.6.29-2019.7.3)] 2019 20th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - The Complex of Multi-Frequency Ultrasonic Apparatuses for the Generation of Mechanical Vibrations of the Physical Objects

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