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[IEEE 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) - Penang, Malaysia (2020.4.6-2020.4.21)] 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) - Patterning Platinum by Selective Wet Etching of Sacrificial Pt-A1 Alloy
Meier, S., Rinck, H., Lange, B., Muellner, E., Brederlow, R., Enzelberger-Heim, M., Summerfelt, S., Kreupl, F., Wolf, B.Year:
2020
DOI:
10.1109/edtm47692.2020.9117886
File:
PDF, 1.56 MB
2020