[IEEE 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) - Edinburgh, United Kingdom (2020.5.4-2020.5.18)] 2020 IEEE 33rd International Conference on Microelectronic Test Structures (ICMTS) - Multiscale modeling of CeO 2 /La 2 O 3 stacks for material/defect characterization

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