Improvement of Field Effect Capacity Type Gas Sensor Thermo...

Materials Science Forum 2020 / 2 Vol. 977

Improvement of Field Effect Capacity Type Gas Sensor Thermo Inertial Parameters by Using Laser Micromilling Technique

Samotaev, Nikolay, Oblov, Konstantin, Etrekova, Maya, Veselov, Denis, Ivanova, Anastasia, Litvinov, Artur
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Volume:
977
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.977.256
Date:
February, 2020
File:
PDF, 1.12 MB
2020
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