Dynamics of Laser-Assisted Silicon Nitride Dielectric...

Biophysical Journal 2020 / 02 Vol. 118; Iss. 3

Dynamics of Laser-Assisted Silicon Nitride Dielectric Breakdown for Deterministic Fabrication of Solid-State Nanopore

Tang, Zifan, He, Xiaodong, Guan, Weihua
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Volume:
118
Journal:
Biophysical Journal
DOI:
10.1016/j.bpj.2019.11.986
Date:
February, 2020
File:
PDF, 41 KB
2020
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