Effects of matching network on mode transitions in a helicon wave plasma source
Hu, Yibo, Ji, Peiyu, Yang, Jiaqi, Jin, Chenggang, Zhuge, Lanjian, Wu, XuemeiVolume:
128
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5131164
Date:
July, 2020
File:
PDF, 1.67 MB
2020