Peculiarities of electron emission from high-density deep...

Journal of Physics Conference Series 2020 / 03 Vol. 1482

Peculiarities of electron emission from high-density deep levels of nanodefects in oxygen-implanted silicon

Danilov, D V, Vyvenko, O F, Loshachenko, A S, Sobolev, N A
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Volume:
1482
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1482/1/012003
Date:
March, 2020
File:
PDF, 1.19 MB
2020
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