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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - H 2 O Vapor Plasma for Bonding PDMS with Various Materials
Matsuo, Fumiharu, Oda, Haruka, Miyake, Fumina, Otsuki, Hideo, Takeuchi, Shoji, Tsuji, OsamuYear:
2020
DOI:
10.1109/MEMS46641.2020.9056418
File:
PDF, 1.35 MB
2020