Beam Plasma Characteristics of a Helicon Plasma Source...

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Beam Plasma Characteristics of a Helicon Plasma Source Measured by a Spatially Resolved Optical Emission Spectroscope

Zhang, Zun, Xie, Kan, Wang, Huihui, Tan, Chang, Ouyang, Jiting
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Year:
2020
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2020.3000245
File:
PDF, 4.03 MB
2020
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