Beam Plasma Characteristics of a Helicon Plasma Source Measured by a Spatially Resolved Optical Emission Spectroscope
Zhang, Zun, Xie, Kan, Wang, Huihui, Tan, Chang, Ouyang, JitingYear:
2020
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2020.3000245
File:
PDF, 4.03 MB
2020