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[IEEE 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) - Penang, Malaysia (2020.4.6-2020.4.21)] 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) - Process-induced $V_{t}$ variability in nanoscale FinFETs: Does $V_{t}$ extraction methods have any impact?
Bhoir, Mandar S., Chiarella, Thomas, Ragnarsson, Lars A., Mitard, Jerome, Horiguchi, Naoto, Mohapatra, Nihar R.Year:
2020
DOI:
10.1109/edtm47692.2020.9117815
File:
PDF, 697 KB
2020