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[IEEE 2020 IEEE International Reliability Physics Symposium (IRPS) - Dallas, TX, USA (2020.4.28-2020.5.30)] 2020 IEEE International Reliability Physics Symposium (IRPS) - A new technique for evaluating stacked nanosheet inner spacer TDDB reliability
Shen, Tian, Watanabe, Koji, Zhou, Huimei, Belyansky, Michael, Stuckert, Erin, Zhang, Jingyun, Greene, Andrew, Basker, Veeraraghavan, Wang, MiaomiaoYear:
2020
DOI:
10.1109/irps45951.2020.9129258
File:
PDF, 659 KB
2020