[IEEE 2020 IEEE XVIth International Conference on the...

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[IEEE 2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Lviv, Ukraine (2020.4.22-2020.4.26)] 2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Stiffness Matrix of MEMS on the Stress-Strain Method Basis

Nevliudov, Igor, Demska, Nataliia, Palagin, Victor, Nevlyudova, Victoria, Botsman, Iryna, Kolesnyk, Kostyantyn
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Year:
2020
DOI:
10.1109/memstech49584.2020.9109509
File:
PDF, 364 KB
2020
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