[IEEE 2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Lviv, Ukraine (2020.4.22-2020.4.26)] 2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) - Stiffness Matrix of MEMS on the Stress-Strain Method Basis
Nevliudov, Igor, Demska, Nataliia, Palagin, Victor, Nevlyudova, Victoria, Botsman, Iryna, Kolesnyk, KostyantynYear:
2020
DOI:
10.1109/memstech49584.2020.9109509
File:
PDF, 364 KB
2020