Adsorption of Titanium Halides on Nitride and Oxide...

Coatings 2020 / 07 Vol. 10; Iss. 8

Adsorption of Titanium Halides on Nitride and Oxide Surfaces during Atomic Layer Deposition: A DFT Study

Park, Jeongwoo, Yu, Neung Kyung, Jang, Donghak, Jung, Eunae, Noh, Hyunsik, Moon, Jiwon, Kil, Deoksin, Shong, Bonggeun
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Volume:
10
Journal:
Coatings
DOI:
10.3390/coatings10080712
Date:
July, 2020
File:
PDF, 834 KB
2020
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