Super-hard and tough Ta1-xWxCy films deposited by magnetron...

Super-hard and tough Ta1-xWxCy films deposited by magnetron sputtering

Hu, Jiaojiao, Li, Hang, Li, Jianliang, Yan, Chengqi, Kong, Jian, Wu, Qiujie, Xiong, Dangsheng
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Volume:
400
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2020.126207
Date:
October, 2020
File:
PDF, 5.22 MB
2020
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