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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Thin-Film Processing Technologies of Piezoelectric Materials for IoT/IoE Applications
Kobayashi, Hiroki, Matsuoka, Kouhei, Tsuyuki, Tatsurou, Suzuki, Akiyoshi, Kimura, Isao, Jinbo, Takehito, Suu, KoukouYear:
2020
DOI:
10.1109/MEMS46641.2020.9056215
File:
PDF, 2.26 MB
2020