[IEEE 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Lyon, France (2020.6.15-2020.6.26)] 2020 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Assessment Of Annealing Treatment For Wrinckle-Less Sio 2 Membrane
Mizushima, Ayako, Reddy, R Ranga, Konishi, Kuniaki, Ezawa, Tomoya, Ota, Etsuko, Kuwata-Gonokami, Makoto, Mita, YoshioYear:
2020
DOI:
10.1109/dtip51112.2020.9139136
File:
PDF, 490 KB
2020