[IEEE 2020 IEEE 40th International Conference on Electronics and Nanotechnology (ELNANO) - Kyiv, Ukraine (2020.4.22-2020.4.24)] 2020 IEEE 40th International Conference on Electronics and Nanotechnology (ELNANO) - Modified Pearson Model for High-Energy Multi-Charge Implantation and Impurity Activation for Sensor Microsystems
Novosiadlyi, Stepan, Mandzyuk, Volodymyr, Hryha, Volodymyr, Terletsky, Andriy, Benko, Taras, Lukovkin, VolodymyrYear:
2020
DOI:
10.1109/elnano50318.2020.9088870
File:
PDF, 340 KB
2020