[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Development of Micro Pump Using Magnetic Artificial Cilia with Metachronal Wave
Shinoda, Hayato, Tsumori, FujioYear:
2020
DOI:
10.1109/mems46641.2020.9056137
File:
PDF, 1.52 MB
2020