Influence of Al pre-deposition time on AlGaN/GaN...

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Journal of Materials Science: Materials in Electronics 2020 / 7

Influence of Al pre-deposition time on AlGaN/GaN heterostructures grown on sapphire substrate by metal organic chemical vapor deposition

Liu, Chuanyang, Wang, Jia, Shen, Yiming, Du, Lin, Zhang, Yachao, Xu, Shengrui, Jiang, Li, Zhang, Jincheng, Hao, Yue
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Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-020-04037-8
Date:
July, 2020
File:
PDF, 3.11 MB
2020
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