Monolithically fabricated sample for the calibration of the...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 07 Vol. 38; Iss. 4

Monolithically fabricated sample for the calibration of the tip-sample thermal conductance in scanning thermal microscopy

Umatova, Zarina, Zhang, Yuan, Lambert, Rory, Dobson, Phillip S., Weaver, Jonathan M. R.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000034
Date:
July, 2020
File:
PDF, 1.22 MB
2020
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