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Realization of a capacitive shunt RF-MEMS switch using straight flexure based non-uniform bridge structure-fabrication and characterization
Angira, Mahesh, Bansal, DeepakJournal:
Microsystem Technologies
DOI:
10.1007/s00542-020-04974-8
Date:
July, 2020
File:
PDF, 1.24 MB
2020