![](/img/cover-not-exists.png)
Global model for pulsed inductively coupled plasma sources: Effect of edge-to-center density ratio and electron heating
Kwon, Deuk-Chul, Yu, Dong-Hun, Kwon, Hyoungcheol, Im, Yeon Ho, Lee, Hyo-ChangVolume:
27
Journal:
Physics of Plasmas
DOI:
10.1063/5.0006505
Date:
July, 2020
File:
PDF, 2.85 MB
2020