Development of two-color resonant ionization sputtered...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 07 Vol. 38; Iss. 4

Development of two-color resonant ionization sputtered neutral mass spectrometry and microarea imaging for Sr

Zhao, Yue, Yoshida, Takeru, Ohmori, Yuzuka, Miyashita, Yuta, Morita, Masato, Sakamoto, Tetsuo, Kato, Kotaro, Terabayashi, Ryohei, Sonnenschein, Volker, Tomita, Hideki, Kawai, Toshihide, Okumura, Takeo
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000006
Date:
July, 2020
File:
PDF, 2.17 MB
2020
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