Photoassisted chemical smoothing of AlGaN surface after...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 07 Vol. 38; Iss. 4

Photoassisted chemical smoothing of AlGaN surface after laser lift-off

Zheng, Zhongming, Long, Hao, Matta, Samuel, Leroux, Mathieu, Brault, Julien, Ying, Leiying, Zheng, Zhiwei, Zhang, Baoping
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000192
Date:
July, 2020
File:
PDF, 2.18 MB
2020
Conversion to is in progress
Conversion to is failed