A Study on the Pattern Effects of Chemical Mechanical...

Electronics 2020 / 07 Vol. 9; Iss. 7

A Study on the Pattern Effects of Chemical Mechanical Planarization with CNN-Based Models

Bao, Han, Chen, Lan, Ren, Bowen
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Volume:
9
Journal:
Electronics
DOI:
10.3390/electronics9071158
Date:
July, 2020
File:
PDF, 6.06 MB
2020
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