Nanometer positioning accuracy over a long term traveling...

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

Naeim, I., Khodier, S.
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Volume:
3
Year:
2012
Journal:
International Journal of Metrology and Quality Engineering
DOI:
10.1051/ijmqe/2012013
File:
PDF, 332 KB
2012
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