Study of the phase nature of boron- and nitrogen-containing...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2020 / 07 Vol. 38; Iss. 4

Study of the phase nature of boron- and nitrogen-containing films by optical and photoelectron spectroscopy

Onnink, Arnoud J., Apaydin, Ramazan O., Aarnink, Antonius A. I., de Jong, Michel P., Gravesteijn, Dirk J., Kovalgin, Alexey Y.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/6.0000193
Date:
July, 2020
File:
PDF, 3.73 MB
2020
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