3D characterisation using plasma FIB-SEM: A large-area...

Ultramicroscopy 2020 / 11 Vol. 218

3D characterisation using plasma FIB-SEM: A large-area tomography technique for complex surfaces like black silicon

Zhang, Yu, Kong, Charlie, Davidsen, Rasmus Schmidt, Scardera, Giuseppe, Duan, Leiping, Khoo, Kean Thong, Payne, David N.R., Hoex, Bram, Abbott, Malcolm
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Volume:
218
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2020.113084
Date:
November, 2020
File:
PDF, 2.59 MB
2020
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