Optically Detected Magnetic Resonance Study of 3D Arrayed Silicon Vacancies in SiC pn Diodes
Yamazaki, Yuichi, Chiba, Yoji, Sato, Shin Ichiro, Makino, Takahiro, Yamada, Naoto, Satoh, Takahiro, Kojima, Kazutoshi, Hijikata, Yasuto, Tsuchida, Hidekazu, Hoshino, Norihiro, Lee, Sang Yun, Ohshima,Volume:
1004
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.1004.343
Date:
July, 2020
File:
PDF, 1.65 MB
2020