In Situ Plasma‐Grown Silicon‐Oxide for Polysilicon...

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Advanced Materials Interfaces 2020 / 07

In Situ Plasma‐Grown Silicon‐Oxide for Polysilicon Passivating Contacts

Alzahrani, Areej, Allen, Thomas G., De Bastiani, Michele, Van Kerschaver, Emmanuel, Harrison, George T., Liu, Wenzhu, De Wolf, Stefaan
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Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.202000589
Date:
July, 2020
File:
PDF, 1.02 MB
2020
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