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In Situ PlasmaâGrown SiliconâOxide for Polysilicon Passivating Contacts
Alzahrani, Areej, Allen, Thomas G., De Bastiani, Michele, Van Kerschaver, Emmanuel, Harrison, George T., Liu, Wenzhu, De Wolf, StefaanJournal:
Advanced Materials Interfaces
DOI:
10.1002/admi.202000589
Date:
July, 2020
File:
PDF, 1.02 MB
2020