Investigation of nitridation time on the quality of...

Materials Letters 2020 / 10 Vol. 277

Investigation of nitridation time on the quality of AlGaN/GaN heterojunction grown on AlN-sputtered sapphire substrate

Ma, Depu, Xu, Shengrui, Tao, Hongchang, Li, Wen, Peng, Ruoshi, Du, Jinjuan, Fan, Xiaomeng, Zhao, Ying, Zhang, Jincheng, Hao, Yue
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Volume:
277
Journal:
Materials Letters
DOI:
10.1016/j.matlet.2020.128395
Date:
October, 2020
File:
PDF, 1.69 MB
2020
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