Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2020 / 09 Vol. 478
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A methodology for customizing implantation profiles of light ions using a single thin foil energy degrader
Taller, Stephen, Naab, Fabian, Was, Gary S.Volume:
478
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2020.07.017
Date:
September, 2020
File:
PDF, 7.64 MB
2020