A green, low-cost method to prepare GaN films by plasma...

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Thin Solid Films 2020 / 8

A green, low-cost method to prepare GaN films by plasma enhanced chemical vapor deposition

Liang, Qi, Wang, Ru-Zhi, Yang, Meng-Qi, Ding, Yang, Wang, Chang-Hao
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Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2020.138266
Date:
August, 2020
File:
PDF, 1.07 MB
2020
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