Functionalized Ag Nanoparticles Embedded in Polymer Resists...

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Functionalized Ag Nanoparticles Embedded in Polymer Resists for High-Resolution Lithography

Moinuddin, Mohamad G., Kumar, Rudra, Yogesh, Midathala, Sharma, Shivani, Sahani, Manoj, Sharma, Satinder K., Gonsalves, Kenneth E
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Journal:
ACS Applied Nano Materials
DOI:
10.1021/acsanm.0c01362
Date:
August, 2020
File:
PDF, 5.49 MB
2020
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