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A Novel Thermistor-Based RF Power Sensor With Wheatstone Bridge Fabricating on MEMS Membrane
Li, Jian-Hua, Liao, Xiaoping, Chu, ChenleiYear:
2020
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2020.3011994
File:
PDF, 3.56 MB
2020