Revisiting particle dynamics in HiPIMS discharges. I. General effects
Hnilica, Jaroslav, Klein, Peter, Vašina, Petr, Snyders, Rony, Britun, NikolayVolume:
128
Journal:
Journal of Applied Physics
DOI:
10.1063/5.0009378
Date:
July, 2020
File:
PDF, 5.16 MB
2020