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Pulse current generator with improved waveform fidelity for high-voltage capacitively coupled plasma systems
Chae, Beomseok, Min, Juhwa, Suh, Yongsug, Kim, Hyejin, Kim, HyunbaeJournal:
Journal of Power Electronics
DOI:
10.1007/s43236-020-00110-x
Date:
June, 2020
File:
PDF, 1.74 MB
2020