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Paraelectric/antiferroelectric/ferroelectric phase transformation in As-deposited ZrO2 thin films by the TiN capping engineering
Wang, Chun-Yuan, Wang, Chin-I, Yi, Sheng-Han, Chang, Teng-Jan, Chou, Chun-Yi, Yin, Yu-Tung, Shiojiri, Makoto, Chen, Miin-JangVolume:
195
Journal:
Materials & Design
DOI:
10.1016/j.matdes.2020.109020
Date:
October, 2020
File:
PDF, 10.82 MB
2020